Oxford Applied Research

The LIon50 is a low energy gas ion source which operates on the principle of electron impact ionisation. It is capable of producing ion beams with energies between 30eV and 1keV with very narrow energy spread. The source is compatible with a variety of gases, including reactive gases such as O2. The instrument incorporates highly efficient water cooling to ensure minimal outgassing during operation. Applications include ion spectroscopy, 2particle detection/calibration and substrate cleaning.